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Hyper V / Hyper V-ST series

Hyper V / Hyper V-ST series

The excimer modules of the Hyper V / Hyper V-ST series have been specially developed for the inline treatment of substrates. They are particularly suitable for activating and cleaning the surfaces of films, paper, and metals. Areas of application are found in the manufacture of special foils and OLED screens, as well as bonding and matting processes.

In order to treat surfaces of various widths, the modules are available in a range of standard lengths, from 300 mm to 2,200 mm. With an irradiation intensity of > 170 mW/cm², the Hyper V / Hyper V-ST series is the highest intensity excimer series on the market. Manufactured in Ushio’s own production facilities under the highest quality standards, our excimer modules guarantee reliable operating times of 1,500 hours and more.

Features

  • Different irradiation sizes from 300 mm to 2,200 mm width
  • Test modules available
  • Flat excimer with the highest intensity on the market
  • Process gas, such as nitrogen, for special applications (optional)
  • Long lifetime of 1,500 hours and more

Technical data Hyper V / Hyper V ST Series

  • Wavelength (nm): 172
  • Intensity (mW/cm²): > 170
  • Lamp lifetime (70 % in h): 1,500
  • Irradiation size (mm): 300–2,200
  • Homogeneity (%):< ± 10
  • Number of excimer emitters: 1–3
  • Constant intensity mode: partially available
  • Power consumption: (W): 600–6,000
  • Nitrogen consumption (l/min): optional

Applications

  • Semiconductor Industry
  • Automotive and Sensor Industry
  • Electronics
  • Packaging

Ushio’s latest brochures and product catalogues can be found on our downloads page. For more information on Ushio’s Excimer products, or if you are ready to make a formal enquiry, please fill in the form on our contact page.

Further Reading

Excimer SUE

ExciJet172 55-130 Lab System

Excimer: The Technology Explained

Care222: Anti-Bacterial, Anti-Viral UV Disinfection Solutions

Fraunhofer ILT (Institute for Laser Technology) – PhotonFlex project

SteriLux SA – The SteriLux sterilisation system