Excimer Treatment

for surface cleaning, surface activation and other special processes

Excimer treatment is a radiation-based process for surface cleaning and surface activation, which can be applied to a wide variety of materials such as plastics, glass or metals. In contrast to other methods, excimer irradiation is particularly precise, uniform and gentle and is, therefore, especially suitable for sensitive surfaces, such as membranes or wafers. Ushio offers two excimer product series: the Hyper V series, which is specially designed for inline treatments and the SUE series, which has been optimised for stationary irradiation.