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UV Excimer Modules

UV Excimer Modules

Vacuum-ultraviolet (VUV) excimer technology is increasingly used to remove organic contamination from substrates, for various surface modification treatments, and for cold polymer cross-linking. USHIO’s compact ExciJet excimer system was specially designed for laboratory use and process development. The larger ExciJet systems have been optimised for production environments where fast processing speed is required.

For an in-depth explanation of excimer technology and it’s capabilities, please click here.


  • Optical cleaning
  • Photo chemistry
  • Pre-treatment for coating of composite materials
  • Photobonding (adhesive-free bonding)
  • Matting
  • Disinfection & removal of contaminants such as dust
  • UV curing
  • Surface activation or molecular modification
  • Biological modification of gases, liquids, and solids

Lamp types

  • USHIO provides a wide variety of products, covering basic research tools, standard sources, and integrated systems optimised for your specific production requirements
  • Concept evaluation tools
  • Wide area exposure sources


  • High energy ensured by short wavelength
  • Cold light source

Click here for an in-depth explanation of excimer technology and it’s capabilities, or for direct sales enquiries click here.

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