Home » Products » UV Excimer Modules

UV Excimer Modules

UV Excimer Modules

Excimer technology is increasingly used to remove organic contamination from substrates, for various surface modification treatments and for cold polymer crosslinking. USHIO’s compact excimer system was specially designed for laboratory use and process development. The larger systems have been optimized for production environments where fast processing speed is required.


  • Optical cleaning
  • Photo chemistry

Lamp types

  • USHIO provides a wide variety of products, covering basic research tools, standard sources, and integrated systems optimized for your specific production requirements.
    • Concept evaluation tools
    • Wide area exposure sources


  • High energy ensured by short wavelength
  • Cold light source


Excimer – English
Excimer – German
Excimer – French
Excimer – Spanish
Excimer – Italian