Superior UV Lamps
An ideal light source for sub-micron (<1µm) lithography, where the resolution highly depends on the wavelength of the light source. USHIO's superior UV lamps feature high irradiation energy over wide exposure area (high uniformity) required for sub-micron lithography.
Ushio Code |
Wattage (W) |
|---|---|
SUV-1500CIL |
1500 |
SUV-1500SIL |
1500 |
SUV-2000HI |
2000 |
SUV-2000NIL |
1750 |
SUV-2001CIL |
2000 |
SUV-2001NIL |
1750 |
SUV-2002NIL |
1750 |
SUV-2011NIL |
2000 |
SUV-2011NIHL |
2000 |
SUV-2500SIL |
2500 |
SUV-2501NIL |
2500 |
SUV-2510NIL |
2500 |
SUV-2510 NIHL |
2500 |
SUV-2701CI |
2700 |
SUV-3500NI |
3500 |
SUV-3500SIL |
3400 |
SUV-5500SI |
5500 |